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Investigation of buried EUV mask defect printability using actinic inspection and fast simulation

机译：利用光化学检测和快速模拟研究埋藏EUV掩模缺陷的可印刷性

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Clifford, C. H.; Chan, T. T.; Neureuther, A. R.; Goldberg, K. A.; Mochi, I.; Liang, T.;
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年度 2009
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1. Comparison of fast three-dimensional simulation and actinic inspection for extreme ultraviolet masks with buried defects and absorber features [J] . Chris H. Clifford, Sandy Wiraatmadja, Tina T. Chan, Journal of Vacuum Science & Technology . 2009,第6期

机译：具有掩埋缺陷和吸收剂特征的极紫外掩模的快速三维模拟和光化检查的比较
2. Detection of Printable EUV Mask Absorber Defects and Defect Adders by Full Chip Optical Inspection of EUV Patterned Wafers [J] . Luciana Meli, Ravi Bonam, Scott Halle, IEEE Transactions on Semiconductor Manufacturing . 2017,第4期

机译：通过EUV图案晶圆的全芯片光学检测来检测可印刷的EUV掩模吸收层缺陷和缺陷添加物
3. Actinic Mask Inspection Using an EUV Microscope: Preparation of a Mirau Interferometer for Phase-Defect Detection [J] . Kazuhiro Hamamoto, Yuzuru Tanaka, Hirotake Kawashima, Japanese Journal of Applied Physics. Part 1, Regular Papers, Brief Communications & Review Papers . 2005,第7B期

机译：使用EUV显微镜进行光化掩模检查：制备用于相缺陷检测的Mirau干涉仪
4. Investigation of buried EUV mask defect printability using actinic inspection and fast simulation [C] . Chris H. Clifford, Tina T. Chan, Andrew R. Neureuther, Conference on photomask technology . 2009

机译：使用光化检查和快速仿真研究掩埋的EUV掩模缺陷可印刷性
5. Simulation and compensation methods for EUV lithography masks with buried defects. [D] . Clifford, Chris Heinz. 2010

机译：具有掩埋缺陷的EUV光刻掩模的仿真和补偿方法。
6. Pulsed Thermography Inspection of Composite Anticorrosive Coatings: Defect Detection and Analysis of Their Thermal Behavior through Computational Simulation [O] . Marcella Grosso, Isabel C. P. Margarit-Mattos, Gabriela R. Pereira 2020

机译：复合抗腐蚀涂层的脉冲热成像检测：通过计算模拟缺陷检测和分析其热行为
7. EUV actinic defect inspection and defect printability at the sub-32-nm half-pitch [O] . Sungmin Huh, Patrick Kearney, Stefan Wurm, 2009

机译：euv光化缺陷检查和缺陷在子32-32-nm半间距上的可打印性

Investigation of buried EUV mask defect printability using actinic inspection and fast simulation

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